期刊
CERAMICS INTERNATIONAL
卷 39, 期 2, 页码 1135-1141出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2012.07.037
关键词
Electrical properties; Al-doped zinc oxide; MF Sputtering; Transmittance
资金
- Guangzhou Research Institute of Non-ferrous Metals [1043074]
- Guangdong International Cooperation Project [2011B050400007]
Aluminum-doped zinc oxide (AZO) thin films have been deposited by MF magnetron sputtering from a ceramic oxide target without heating the substrates. This study has investigated effects of sputtering power on the structural, electrical and optical properties of the AZO films. The films delivered a hexagonal wurtzite structure with (002) preferential orientation and uniform surface morphology with 27-33 nm grain size. The results indicate that residual stress and grain size of the AZO films are dependent on sputtering power. The minimum resistivity of 7.56 x 10(-4) Omega cm combined with high transmittance of 83% were obtained at deposited power of 1600 W. The films delivered the advantages of a high deposition rate at low substrate temperature and should be suitable for the fabrication of low-cost transparent conductive oxide layer. (C) 2012 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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