期刊
CERAMICS INTERNATIONAL
卷 38, 期 5, 页码 3875-3883出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.ceramint.2012.01.039
关键词
Films; Grain size; Optical properties; Electrical conductivity; ZnO
资金
- Department of Science and Technology (DST), Govt. of India through SERC
Transparent conducting molybdenum (2 at.%) doped zinc oxide (MZO) films were prepared with various substrate temperatures by spray pyrolysis technique on glass substrates. The effect of substrate temperature on the structural, surface morphological, electrical, optical and photoluminescence properties of these films were studied. The X-ray diffraction analysis revealed that the films are polycrystalline in nature having a wurtzite structure with a preferred grain orientation in the (0 0 2) direction. The average crystallite size of the films increases from 17 nm to 28 nm with the increase of substrate temperature from 573 K to 623 K, thereafter it slightly decreases with further increase of substrate temperature to 723 K. Analysis of structural parameters indicates minimum strain and stress values for films deposited at a substrate temperature of 673 K. From atomic force microscopy (AFM) analysis, it is found that rms roughness of the films deposited at 623 K is a minimum, indicating better optical quality. The scanning electron microscopy (SEM) measurements showed that the surface morphology of the films changes with substrate temperature. Optical parameters such as optical transmittance, reflectance, refractive index, extinction coefficient, dielectric constant and optical band gap have been studied and discussed with respect to substrate temperature. Room temperature photoluminescence (PL) spectra show the deep-level emission in the MZO thin films. The films exhibit a low electrical resistivity of 6.22 x 10(-2) Omega cm with an optical transmittance of 75% in the visible region at a substrate temperature of 623 K. (C) 2012 Elsevier Ltd and Techna Group S.r.l. All rights reserved.
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