期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 73, 期 3, 页码 1640-1642出版社
AMER INST PHYSICS
DOI: 10.1063/1.1445827
关键词
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Parabolic compound refractive lenses are high quality optical components for hard x rays. They are particularly suited for full field imaging, with applications in microscopy and x-ray lithography. Taking advantage of the large penetration depth of hard x rays, the interior of opaque samples can be imaged with submicrometer resolution. To obtain the three-dimensional structure of a sample, microscopy is combined with tomographic techniques. In a first hard x-ray lithography experiment, parabolic compound refractive lenses have been used to project the reduced image of a lithography mask onto a resist. Future developments are discussed. (C) 2002 American Institute of Physics.
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