期刊
THIN SOLID FILMS
卷 402, 期 1-2, 页码 232-236出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(01)01416-X
关键词
phase-change film; AgInSbTe; optical constant; reflectivity contrast
Ag8In,14Sb55Te23 phase-change films were deposited on K9 glass substrates by RF magnetron sputtering technology using an Ag-In-Sb-Te alloy target. The optical properties and short-wavelength optical storage properties of Ag8In14Sb55Te23 films were studied. X-Ray diffraction results indicate that the crystallized compounds consist mainly of AgSbTe2, with small amounts of Sb and AgInTe2. Comparatively large absorbance was observed in the wavelength range of visible light. The optical storage characteristics of Ag8In14Sb55Te23 thin films indicate that larger reflectivity contrast can be obtained at lower writing power and shorter writing pulse width. (C) 2002 Elsevier Science B.V. All rights reserved.
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