Microstructural and mechanical properties investigation of electrode posited and annealed LIGA nickel structures

Lithographic, Galvanoformung, Abformung (LIGA) component fabrication is a process in which structural material is deposited into a patterned polymethyl-methacrylate (PMMA) mold realized through deep X-ray lithography. The process permits fabrication of metal microelectromechanical systems (MEMS) components with representative dimensions that range from a few microns to several millimeters. This investigation characterizes the microstructure and mechanical properties of LIGA-fabricated nickel (LIGA Ni), electrodeposited using Watts bath and sulfamate bath chemistries. As a prelude to studying high-temperature joining processes in LIGA Ni components, an annealing investigation was conducted on samples fabricated from both bath chemistries. Mechanical properties and microstructural analyses on as-deposited and annealed samples were conducted using a mini servohydraulic load frame and the electron backscatter diffraction (EBSD) microtexture measurement technique. The deposits were found to have fine-grain, highly textured microstructures oriented with an acicular or columnar morphology relative to the plating direction. Previously uncharacterized, anomalous, local spatial variations in the crystallographic texture of the as-deposited microstructures were identified by EBSD analyses. Microstructural evolution during annealing seemed to follow a recovery, recrystallization, rapid grain-growth microstructural-evolution mechanism in LIGA Ni deposited from the sulfamate bath chemistry and simply a recovery and grain-growth microstructural-evolution mechanism in LIGA Ni deposited from the Watts bath chemistry. The evolution of microstructure in the annealed samples corresponded with a dramatic drop in their strength and determined the limiting diffusion-bonding temperature for LIGA Ni components.