High efficiency single crystalline silicon solar cells

A solar cell process with two mask levels has been developed and the fabrication process is described in this paper. Texture and selective emitter are implemented with one lithographic step and the second mask level is needed for front contact grid formation. Texturing has been realized with an inverted pyramid structure, which has proven to be effective in reflection reduction. A solar cell efficiency of 16.4% has been achieved with the simple two mask level process.