期刊
JOURNAL OF THERMAL ANALYSIS AND CALORIMETRY
卷 69, 期 3, 页码 1067-1073出版社
SPRINGER
DOI: 10.1023/A:1020661501961
关键词
carrier diffusion; photoacoustic technique; porosity; porous silicon; thermal diffusion; thermal diffusivity
We have applied photoacoustic (PA) technique to study the thermal properties of porous silicon (PS) films formed on p-type Si substrates by electrochemical anodic etching. Four PS samples with close thicknesses but greatly different porosities (from 20 to 60%) were examined. From the dependences of the PA signals on the modulation frequency of excitation light measured under a transmission detection configuration (TDC), effective thermal diffusivities for the two-layered PS/Si samples were determined and found to decrease greatly from 0.095 to 0.020 cm(2) s(-1) as the porosity increased from 20 to 60%.
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