期刊
CARBON
卷 40, 期 8, 页码 1153-1166出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S0008-6223(01)00291-3
关键词
carbon films; diamond-like carbon; plasma deposition; electronic structure; optical properties
Hydrogenated amorphous carbon (a-C:H) films prepared by plasma decomposition of hydrocarbons exhibit a wide variety of electronic and mechanical properties depending on their deposition conditions. which makes them very interesting for applications in several domains. This versatility is essentially due to the presence of both sp(2)- and sp(3)-hybridized carbon atoms in variable proportions, and to the tendency of the sp(2) C atoms to gather into pi-bonded clusters with different bonding configurations. The relationships between the film microstructure and their electronic density of states. as deduced from a detailed analysis of their optical properties over a large spectral range. are described and discussed, taking as reference materials the purely sp(2) (graphite) and purely sp(3) (diamond) carbon crystalline phases. as well as the prototype hydrogenated amorphous tetra-coordinated semiconductor. hydrogenated amorphous silicon. It is shown that the type of clustering of the sp(2) C atoms is certainly more determinant for the electronic density of states. and especially for the optical gap value, than the proportion of these atoms in the material. (C) 2002 Elsevier Science Ltd. All rights reserved.
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