期刊
DIAMOND AND RELATED MATERIALS
卷 11, 期 3-6, 页码 608-611出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-9635(01)00653-7
关键词
diamond films; plasma; chemical vapor deposition; spectroscopy
The formation of C-2 in an argon/hydrogen/methane 2.45 GHz microwave plasma has been studied by cavity ring-down spectroscopy and optical emission spectroscopy by observing the d 3Pi(g)-a 3Pi(u) optical transition in absorption and emission, respectively. The two states are shown to be in equilibrium under the plasma conditions adopted for this study. The plasma parameters are similar to those adopted for the growth of nanocrystalline diamond. (C) 2002 Elsevier Science B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据