4.6 Article Proceedings Paper

The cavity ring-down spectroscopy of C-2 in a microwave plasma

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DIAMOND AND RELATED MATERIALS
卷 11, 期 3-6, 页码 608-611

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ELSEVIER SCIENCE SA
DOI: 10.1016/S0925-9635(01)00653-7

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diamond films; plasma; chemical vapor deposition; spectroscopy

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The formation of C-2 in an argon/hydrogen/methane 2.45 GHz microwave plasma has been studied by cavity ring-down spectroscopy and optical emission spectroscopy by observing the d 3Pi(g)-a 3Pi(u) optical transition in absorption and emission, respectively. The two states are shown to be in equilibrium under the plasma conditions adopted for this study. The plasma parameters are similar to those adopted for the growth of nanocrystalline diamond. (C) 2002 Elsevier Science B.V. All rights reserved.

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