An integrated optical oxygen sensor fabricated using rapid-prototyping techniques

This paper details the design and fabrication of an integrated optical biochemical sensor using a select oxygen-sensitive fluorescent dye, tris(2,2A-bipyridyl) dichlororuthenium(II) hexahydrate, combined with polymeric waveguides that are fabricated on a glass substrate. The sensor uses evanescent interaction of light confined within the waveguide with the dye that is immobilized on an SU-8 waveguide surface. Adhesion of the dye to the integrated waveguide surface is accomplished using a unique process of spin-coating/electrostatic layer-by-layer formation. The SU-8 waveguide was chemically modified to allow the deposition process. Exposure of the dye molecules to the analyte and subsequent chemical interaction is achieved by directly coupling the fluid channel to the integrated waveguide. The completed sensor was linear in the dissolved oxygen across a wide range of interest and had a sensitivity of 0.6 ppm. A unique fabrication aspect of this sensor is the inherent simplicity of the design, and the resulting rapidity of fabrication, while maintaining a high degree of functionality and flexibility.