期刊
INDUSTRIAL ROBOT-AN INTERNATIONAL JOURNAL
卷 30, 期 4, 页码 326-330出版社
EMERALD
DOI: 10.1108/01439910310479595
关键词
adhesion; handling; assembly
Describes the benefits of using electroadhesion when handling very delicate, polished and/or coated optical and electro-optical microcomponents. Electroadhesion is a technique already familiar to those working in the semiconductor industry and is eminently suitable for the handling of microcomponents in air, gas or vacuum.
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