Measurement of extreme-ultraviolet attenuation edges of magnesium, tin, and indium filters

We determined the energies of the Mg L-2,L-3, Sn N-4,N-5, and In N-4,N-5 attenuation edges by measuring the transmission of high-resolution synchrotron radiation through thin filters. The Al L-2,L-3 and Si L-3 edges observed in the first and higher diffraction orders from the monochromator were used as energy fiducials. For each attenuation edge, the onset of attenuation with increasing energy and the inflection point of the attenuation curve were measured. The measured energy values were compared with previously determined attenuation edge energies and with electron binding energies. The measured energies of the inflection points are Mg L-2 (49.89 +/- 0.02 eV), Mg L-3 (49.58 +/- 0.02 eV), Sn N-4 (25.00 +/- 0.02 eV), Sn N-5 (23.97 +/- 0.02 eV), In N-4 (17.66 +/- 0.02 eV), and In N-5 (16.70 +/- 0.02 eV). (C) 2003 Optical Society of America.