期刊
REVIEW OF SCIENTIFIC INSTRUMENTS
卷 74, 期 1, 页码 645-647出版社
AMER INST PHYSICS
DOI: 10.1063/1.1520316
关键词
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We present an imaging system that enables the extraction of three different types of information: First, the topography measurement of an electronic device at rest; then, two other informations are obtained when the same device is submitted to a transient current: on one hand, the induced surface displacement and on the other hand, the qualitative surface temperature variations field. The same bench includes two imaging techniques, one based upon interferometry, the other upon thermoreflectance, both of them using a light-emitting diode as a source of light. Results on a microheater are presented. (C) 2003 American Institute of Physics.
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