4.7 Article

Evaluation of crystalline germanium thin films electrodeposited on copper substrates from propylene glycol electrolyte

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SURFACE & COATINGS TECHNOLOGY
卷 162, 期 1, 页码 101-105

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ELSEVIER SCIENCE SA
DOI: 10.1016/S0257-8972(02)00576-5

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germanium; electroplating; X-ray diffraction; infrared spectroscopy; atomic force microscopy; roughness

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Germanium thin films electrochemically deposited at 300 K from a solution of GeCl4, in propylene glycol were investigated using X-ray diffraction (XRD), infrared (IR) spectroscopy and atomic force microscopy (AFM). XRD reveals that the germanium electrodeposits are of crystalline structure and have the preferred crystallographic growth orientation [220]. The presence of the hydrogen bonding in the germanium films such as Ge-H and Ge-H-2 is shown from the IR absorption and does not cause a phase transition from crystalline structures to amorphous structures. The AFM images exhibit anomalous surface roughening behaviors in growth that deviate from statistical surface growth models and indicate a transition from rough surfaces to smooth surfaces. (C) 2002 Elsevier Science B.V All rights reserved.

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