Carbon nanopillar laterally grown with electron beam-induced chemical vapor deposition

We found that the lateral growth of a carbon nanopillar with electron beam-induced chemical vapor deposition (EB-CVD) was mainly dominated by forward scattering of the electron beam. The minimum diameter of the carbon nanopillar was reduced to 5 nm. In contrast, vertical growth with EB-CVD produced thicker pillars similar to50 nm in diameter, with a shape that reflected forward scattering of the primary electrons. Graphitization of the amorphous carbon nanopillars was also demonstrated by annealing, in which nanoiron particle traces were graphitized. (C) 2003 American Vacuum Society.