期刊
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B
卷 21, 期 6, 页码 2737-2741出版社
A V S AMER INST PHYSICS
DOI: 10.1116/1.1630329
关键词
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Focused-ion-beam chemical vapor deposition (FIB-CVD) is an excellent technology for forming three-dimensional nanostructures. Various diamond-like-carbon (DLC) free-space-wirings have been demonstrated by FIB-CVD using a computer-controlled pattern generator, which is a commercially available pattern generator for electron-beam (EB) lithography. The material composition and crystal structure of DLC free-space-wiring were studied by transmission-electron microscopy and energy-dispersive x-ray spectroscopy. As a result, it became clear that DLC free-space-wining is amorphous carbon containing a Ga core in the wire. Furthermore, the electrical resistivity measurement of DLC free-space-wiring was carried out by two terminal electrodes. An electrodes were fabricated by EB lithography and a lift-off process. The electrical resistivity was about 100 Omega cm at room temperature. (C) 2003 American Vacuum Society.
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