期刊
OPTICAL MATERIALS
卷 21, 期 1-3, 页码 495-498出版社
ELSEVIER SCIENCE BV
DOI: 10.1016/S0925-3467(02)00189-1
关键词
channel waveguide; grating; nonlinear optical polymer; mask/master; replica
Channel waveguide with grating is fabricated in nonlinear optical (NLO) polymer thin films by means of simultaneous embossing and photobleaching. A combined structure of mask/master consisting of a photomask part and a grating die part which is made of polyimide is fabricated. Then the mask/master is set on the NLO polymer films and both embossing and photobleaching are performed simultaneously. Profiles of the replica grating and the channel waveguide are estimated. (C) 2002 Elsevier Science B.V. All rights reserved.
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