期刊
NANOTECHNOLOGY
卷 14, 期 12, 页码 1246-1250出版社
IOP PUBLISHING LTD
DOI: 10.1088/0957-4484/14/12/002
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Amorphous thin films of composition Fe67Co18Si1B14 have been deposited onto glass substrates by KrF excimer laser ablation operating with 30 ns pulses at a repetition rate of 11 Hz and using a METGLAS2605CO(R) target as a function of the degree of focusing of the beam. We were able to deposit thin films and to prepare very soft magnetic amorphous thin films with a coercivity of about 400 A m(-1). This level of magnetic softness is appropriate for different technological applications of amorphous thin films. The de-focused laser deposition regime seems a suitable method for fabrication of soft thin films and may have additional advantages compared with traditional in-focus deposition.
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