期刊
OPTIK
卷 115, 期 2, 页码 94-96出版社
URBAN & FISCHER VERLAG
DOI: 10.1078/0030-4026-00336
关键词
in-line holography; phase contrast imaging; phase retrieval
类别
We present an approach for quantitative phase contrast imaging and optical metrology. This technique uses a CCD for in-line hologram recording and the phase retrieval algorithm for hologram reconstruction. The obtained phase distribution is equal, module 2pi, to the phase distribution of the surface of the object. An application to surface profilometry is presented and good measurement result has been achieved.
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