期刊
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
卷 24, 期 6, 页码 1669-1672出版社
ELSEVIER SCI LTD
DOI: 10.1016/S0955-2219(03)00454-0
关键词
capacitors; dielectric properties; perovskites; residual stress; sol-gel process
This paper describes the effect of thermal expansion coefficients of the substrates on the residual stress in lead titanate (PT) thin film. The residual stress in the film on the different substrates was calculated from the phonon mode shift. In addition, the dielectric constant for the film was calculated from the lattice mode frequency. As a result, the residual stress and the dielectric behavior depended upon the substrates. (C) 2003 Elsevier Ltd. All rights reserved.
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