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Conductivity and the Hall coefficient of nanostructured titanium nitride films

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TECHNICAL PHYSICS LETTERS
卷 30, 期 11, 页码 930-932

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MAIK NAUKA/INTERPERIODICA/SPRINGER
DOI: 10.1134/1.1829346

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The conductivity and the Hall coefficient of nanostructured TiN films synthesized by nonreactive RF magnetron sputtering have been experimentally studied. The mechanism of conductivity and the role of grain size are discussed. (C) 2004 MAIK Nauka/Interperiodica.

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