期刊
JOURNAL OF OPTICS A-PURE AND APPLIED OPTICS
卷 6, 期 1, 页码 94-97出版社
IOP PUBLISHING LTD
DOI: 10.1088/1464-4258/6/1/017
关键词
microlens array; sol-gel; direct laser writing; SiO2/ZrO2; laser diode; single mode fibre
类别
This paper presents a kind of inorganic-organic hybrid SiO2/ZrO2 sol-gel material successfully developed for use in a single-step fabrication of a refractive spherical microlens array (MLA). The single-step fabrication method employs direct laser writing technique to generate a designed spherical MLA on a layer of the sol-gel film. The method offers unique advantages over the conventional photoresist-based fabrication technology by eliminating the need for using a complex ion beam etching process and costly high-energy beam-sensitive grey scale mask. The measured results show that the microlenses have uniform dimensions, smooth surfaces, and strong focusing function. Furthermore, the fabricated MLA, as a coupler between a laser diode and a single mode fibre, has greatly improved the coupling efficiency between them.
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