4.8 Article

Impact of oxygen adsorption on a population of mass produced carbon nanotube field effect transistors

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CARBON
卷 47, 期 6, 页码 1493-1500

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PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/j.carbon.2009.01.042

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  1. Nanometrology Program of Oregon's Nanoscience and Microtechnologies institute (ONAMI)
  2. National Science Foundation and the Office of Naval Research

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A large population of carbon nanotube field effect transistors (CNT-FETs), including a variety of channel morphologies with single and multiple tubes, was electrically characterized in atmospheric, ultra-high vacuum (UHV) and oxygen-rich environments. Devices were systematically classified according to the number and nature of the bridging CNTs based on a rigorous device characterization methodology. A statistical analysis of the interaction of oxygen with such a complex population of devices reveals shifts in carrier type, contact resistance and threshold voltages indicative of both charge trapping and transport barrier modulation at the tube-electrode interface. Devices with a single semiconducting tube could be changed from p-type (hole conduction) at atmosphere to n-type (electron conduction) through vacuum-annealing. Furthermore, the average resistance of these CNT-FETs after annealing was observed to decrease from 2.16 M Omega under UHV to 1.0 M Omega in the presence of pure oxygen while threshold voltages shifted from -5.5 V to -2.2 V. Overall responses to ambient conditions is dependent on the device morphology as well as the use of thermal annealing. (C) 2009 Elsevier Ltd. All rights reserved.

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