Performance of nanomanipulator fabricated on glass capillary by focused-ion-beam chemical vapor deposition

An electrostatic 3D nanomanipulator that can perform inclusion of nano parts and cell operation has been developed by focused-ion-beam chemical vapor deposition (FIB-CVD). This 3D nanomanipulator has 4 fingers in order to catch the target of various shapes firmly. The movable principle is that an electric charge is accumulated in the structure by applying voltage to 4 fingers structure and it moves by repulsion of the electric charge. Furthermore, we succeeded to catch the microsphere (polystyrene latex with a diameter of 1 mum) by using this 3D nanomanipulator with 4 fingers. (C) 2005 American Vacuum Society.