期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
卷 44, 期 20-23, 页码 L693-L695出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.44.L693
关键词
carbon naotube; double-walled CNT; plasma enhanced CVD; Co catalyst; aligned; high growth rate
Carbon nanotube (CNT) films were grown using microwave plasma-enhanced chemical vapor deposition. Catalytic cobalt (Co) nanoparticles were deposited on a silicon substrate using pulsed arc deposition. A titanium nitride (TiN) thin film was used as a buffer layer on the substrate in order to prevent the formation of Co silicide. A dense, vertically aligned, double-walled CNT (DWNT) film was grown rapidly on the Co-catalyzed Si substrate. The CNTs grew at an extremely high rate of 600 nm/s during the first 10 min of growth. Dense DWNT films with thicknesses of over 500 mu m were obtained in 20 min.
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