Identification of carbon phases and analysis of diamond/substrate interfaces by Raman spectroscopy

Raman spectroscopy is employed to characterize thin diamond and diamond-like carbon films deposited by hot filament chemical vapour deposition (HFCVD). A method is proposed and experimentally verified for a contact-less measurement of the actual substrate temperature by Raman spectroscopy. (C) 2004 Elsevier Ltd. All rights reserved.