期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
卷 44, 期 16-19, 页码 L479-L481出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.44.L479
关键词
organic thin film transistor; pentacene; top-contact; alignment-free fabrication; submicron-length channel
We propose a simple fabrication method for self-aligned top contacts for an organic thin film transistor (TFT) that can be miniaturized. The self-aligned top electrodes are formed without any break in the vacuum condition after the formation of an organic channel on the substrate with a prefabricated insulating structure. As a demonstration of this method, pentacene TFTs with submicron-length channels have been fabricated and Successfully operated. Scanning electron microscopy of TFTs reveals well-defined TFT structures as expected.
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