Ba0.5Sr0.5TiO3 (BST) thin films are among the best-known ferroelectric and dielectric materials. Ce-doped BST films have been fabricated by pulsed laser deposition in order to enhance their dielectric properties. X-ray diffraction, atomic force microscopy, and Raman spectroscopy have been used to study variations of crystal structure, surface morphologies, and phase stability of Ce-doped BST films, respectively. A strong influence of Ce doping on the properties of the BST films has been observed. First, a small amount of Ce dopant makes easy epitaxial growth of a BST film with a smooth surface on a MgO substrate. Second, residual stress in a BST film on a MgO substrate can be reduced by Ce doping, as demonstrated by the blueshift of phonon peaks in Raman spectroscopy. (c) 2006 American Institute of Physics.
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