期刊
出版社
ELSEVIER
DOI: 10.1016/j.nimb.2005.08.023
关键词
cluster; ion beam; sputtering yield; size distribution; empirical formula
In order to investigate the dependence of the sputtering yield on cluster size, surfaces were irradiated with cluster ion beams with various size distributions, and the sputtering yields were measured. It was found that there was a threshold energy for sputtering with cluster ion irradiation. When the cluster size was constant, the sputtering yield was proportional to acceleration energy. These results suggested an empirical formula to calculate sputtering yield from the ion energy and the size distribution of the cluster. The empirical formula indicates that the sputtering yield is proportional to the 1.1 power of the size, when the acceleration energy per atom is constant. (c) 2005 Elsevier B.V. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据