期刊
JOURNAL OF THE EUROPEAN CERAMIC SOCIETY
卷 26, 期 10-11, 页码 1835-1839出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.jeurceramsoc.2005.09.011
关键词
BST; films; dielectric properties; electrical properties; perovskites
Polycrystalline BaxSr1-xTiO3 (x = 0.3, 0.4, 0.5) (BST) thin films with a thickness of 200 nm were deposited on r-cut sapphire substrates by rf sputtering method. The permittivity and loss tangent of the films were successfully observed in the range of 1-3 GHz, by utilizing the on-wafer through-reflect-line (TRL) calibration method although the estimated relative permittivity depended on an applied power to waveguides and the loss tangent had the dispersion around I GHz even in the case of 2 mu m-thick aluminum. Finally, we concluded that the BST thin film with x = 0.4 is the most suitable for microwave tunable devices because it had the lowest loss tangent and relatively high permittivity. (c) 2005 Elsevier Ltd. All rights reserved.
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