期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
卷 45, 期 1-3, 页码 L71-L73出版社
INST PURE APPLIED PHYSICS
DOI: 10.1143/JJAP.45.L71
关键词
variable-pressure SEM; diamond; electron beam; nanoprocessing
We demonstrated diamond processing using a variable pressure scanning electron microscope. Dents were formed in diamond by electron beam irradiation in air, nitrogen gas, oxygen gas, and water vapor. The processing in oxygen atmosphere showed the highest efficiency. The processing mechanism can be explained in terms of gas ion sputtering and chemical reaction. We used this method to remove residue on a diamond device, which showed that it is practical for fabricating diamond-based nano-devices.
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