期刊
JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS
卷 18, 期 4, 页码 367-379出版社
SPRINGER
DOI: 10.1007/s10854-006-9049-8
关键词
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Glancing angle deposition (GLAD) is a physical vapour deposition method used to fabricate highly functional thin films with an engineerable columnar morphology. Recent developments in GLAD technology have produced columnar nanostructures of increased complexity, including periodic, nanofibrous, perforated, and graded porosity thin films for use in applications ranging from sensors and actuators to optical filters, microfluidics, and catalysis. A brief review of GLAD methodology and historical developments is followed by a discussion of the latest developments in this field.
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