期刊
INTEGRATED FERROELECTRICS
卷 95, 期 -, 页码 54-65出版社
TAYLOR & FRANCIS LTD
DOI: 10.1080/10584580701756482
关键词
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Biologically-inspired autonomous micro-robots have a variety of anticipated applications resulting from their unique scale and cooperative potential. To achieve locomotion comparable to biological systems, these micro-robots will require actuators substantially stronger than most existing MEMS actuation technologies. Piezoelectric thin-films can meet these specifications while drawing limited power and contributing little mass to micro-robotic systems. Theoretical actuation requirements for micro-robotic applications show that lead-zirconium-titanate (PZT) thin-film actuators can meet these requirements, including a new thin-film PZT lateral actuator developed by the United States Army Research Laboratory. Experimental results and a comparison to other common lateral actuation technologies are presented.
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