期刊
MATERIALS AND MANUFACTURING PROCESSES
卷 22, 期 2, 页码 175-179出版社
TAYLOR & FRANCIS INC
DOI: 10.1080/10426910601062222
关键词
hardness; nanoindentation; nickel-titanium thin films; shape memory alloys; stress-induced phase transformation; Young's modulus
Ni - Ti thin films of various compositions were sputtered-deposited on silicon substrates. Their mechanical properties ( hardness and Young's modulus) were then determined using a nanoindenter equipped with a Berkovich tip. This paper examines the effects of composition on the mechanical properties ( hardness and Young's modulus) of the sputter deposited Ni - Ti thin films. This is of particular interest since the actuation properties of these shape memory alloy films are compositionally sensitive. The surface-induced deformation is revealed via Atomic Force Microscopy (AFM) images of the indented surfaces. Which show evidence of material pile-up that increases with increasing load. The measured Young's moduli are also shown to provide qualitative measures of the extent of stress-induced phase transformation in small volumes of Ni - Ti films.
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