期刊
CRYOGENICS
卷 47, 期 9-10, 页码 474-482出版社
ELSEVIER SCI LTD
DOI: 10.1016/j.cryogenics.2007.04.014
关键词
semiconductors; thin films; cryoclectronics; instrumentation; magnetic measurements
Our paper discusses and reviews the properties of a range of semiconductor sensors, which have been developed for thermometry in cryogenic applications. The range of sensors developed includes a family of single and dual element resistance thermometers based on Ge-on-GaAs films. The thin film devices were produced using standard semiconductor processing techniques and provide high device sensitivity within the range 0.03-500 K. The construction and characteristics of the sensors are presented together with a discussion of their sensitivities to magnetic fields and ionising radiation. (C) 2007 Elsevier Ltd. All rights reserved.
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