期刊
JOURNAL OF MATERIALS CHEMISTRY
卷 17, 期 17, 页码 1699-1706出版社
ROYAL SOC CHEMISTRY
DOI: 10.1039/b617133h
关键词
-
A new series of anionic photoacid generators (PAGs) and corresponding polymers were prepared. The thermostability of PAG bound polymers was superior to that of PAG blend polymers. PAG incorporated into the polymer main chain showed improved resolution when compared with the PAG blend polymers. This was demonstrated by extreme ultraviolet lithography (EUVL) results: the fluorine PAG bound polymer resist gave 45 nm ( 1 : 1), 35 nm ( 1 : 2), 30 nm ( 1 : 3) and 20 nm ( 1 : 4) Line/Space as well as the 50 nm ( 1 : 1) elbow pattern.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据