期刊
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING
卷 86, 期 1, 页码 49-54出版社
SPRINGER HEIDELBERG
DOI: 10.1007/s00339-006-3721-y
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Fabrication of patterned materials in ferroelectric LiNbO3 and LiTaO3 crystals using femtosecond laser micromachining is presented and discussed. Damage feature sizes in the 10-100 mu m range were achieved using 800-nm, 50-fs (FWHM) ultra-fast laser pulses with energies ranging from 10 mu J up to 350 mu J. Fabrication of polaritonic devices such as waveguides, resonators, focusing reflectors, diffractive and dispersive elements, photonic band gap materials, and other microstructures is demonstrated.
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