期刊
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS
卷 46, 期 1-3, 页码 L86-L88出版社
JAPAN SOC APPLIED PHYSICS
DOI: 10.1143/JJAP.46.L86
关键词
transparent conducting oxide; titanium dioxide; pulsed laser deposition
Nb-doped anatase TiO2 (Ti0.94Nb0.06O2) films with excellent conductivity and transparency were deposited on non-alkali glass by pulsed laser deposition. X-ray diffraction analysis and transmission electron microscopy confirmed that the obtained films were polycrystalline with anatase structure. The films deposited at a substrate temperature of 250 degrees C with subsequent H-2 annealing at 500 degrees C showed a resistivity of 1.5 x 10(-3) Omega(.)cm at room temperature and an optical transmittance of 60-80% in the visible region. These results indicate that anatase Ti0.94Nb0.06O2 has great potential as a transparent conducting oxide that could replace Sn-doped In2O3 (ITO).
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