期刊
BIOSENSORS & BIOELECTRONICS
卷 25, 期 2, 页码 475-481出版社
ELSEVIER ADVANCED TECHNOLOGY
DOI: 10.1016/j.bios.2009.08.006
关键词
Neural probes; Glass microprobe; TSV; 3D integration
类别
资金
- NSC of Taiwan [NSC-96-2627-E-007-002, NSC-96-2628-E-007-007-MY3]
The probe array is a useful tool for neurophysiology to detect and record neural signals. Thus, the better understanding of neural systems can be achieved. Microfabricated probes have been widely used since fine-spacing probes with well-defined electrodes in smaller footprint can be created. This study presents a novel process to realize glass 2D-microprobe array. Dielectric material like glass can provide better signal isolation capability and biocompatibility. The through silicon vias (TSVs) can also be integrated with the glass 2D-microprobe using the micromachining process. The vertical integration of chips containing glass 2D-microprobe array is realized using these silicon TSVs. The 3D-microprobe array can be easily implemented after vertical assembly of 2D-microprobe chips using bonding. In application, the 2D glass microprobe is fabricated and characterized with a low impedance of 439 k Omega at 1 kHz. The action potential of crayfish's nerve cord has successfully been recorded using the glass microprobe with peak-to-peak amplitude of 228 mu V, and SNR of 46.42. The spontaneous spike of rat's cortex has also been recorded by the glass microprobe with peak-to-peak amplitude of 90 mu V, and SNR of 19.72. (C) 2009 Elsevier B.V. All rights reserved.
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