4.6 Article

Integrated Nanomanipulator With In-Process Lithography Inspection

期刊

IEEE ACCESS
卷 8, 期 -, 页码 95378-95389

出版社

IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/ACCESS.2020.2996138

关键词

Inspection; Probes; Manipulators; Nanoscale devices; Nanobioscience; Lithography; Nanomanipulators; nanolithography; atomic force microscopy; nanomachining; nanoscale inspection

资金

  1. King Abdulaziz City for Science and Technology through the National Science, Technology and Innovation Plan, King Fahd University of Petroleum and Minerals (KFUPM-DSR) [12-NAN 3021-04]

向作者/读者索取更多资源

Nanomanipulation techniques are extensively in use not only to reveal more characteristics of nano, micro and mesoscopic phenomena but also to build functional nano-devices that can bridge components between two or more scales to diversify the functions. In this paper, a novel integrated and numerically controlled instrument for nanomanipulation, imaging, in-process inspection using lithography with AFM back-to-back probes and characterization of materials at nanoscale is presented. A feature of common datum to all operations to avoid accuracy degradation between references is set. Robotic arms secure nanometre accuracy in the manipulation. The variety of operations is supported by multiple end-effector tools, e.g. force and temperature measurement. Examples are discussed. The availability of such an instrument with integrated functions appeared to be extremely helpful in addressing various fundamental problems in science and engineering such as understanding, modelling and testing nano-machining process, biomimetic design, exact construction of nano-structure arrays, and inspection of devices with complex features.

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