期刊
IEEE SENSORS LETTERS
卷 4, 期 8, 页码 -出版社
IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC
DOI: 10.1109/LSENS.2020.3006813
关键词
Sensor-actuators; electrothermal actuator; LiDAR; microelectromechanical (MEMS) mirror
资金
- US Office of Naval Research [N00014-18-1-2663]
- NSF MIST Center at the University of Florida
Microelectromechanical (MEMS) mirrors have provided a fast and compact method to modulate light for mobile-scale projectors, LiDAR, and computational cameras. In this letter, we propose a new MEMS mirror design and its actuation method that is specifically built for low-voltage, low-current, and digital-driven IoT applications. The MEMS mirror specifically designed with direct actuation from the microcontroller was successfully fabricated and characterized. A full low-power LiDAR system based on the fabricated MEMS mirror was demonstrated, which was powered by a 9-V commercial battery.
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