期刊
JOURNAL OF SUPERHARD MATERIALS
卷 42, 期 2, 页码 68-77出版社
ALLERTON PRESS INC
DOI: 10.3103/S1063457620020069
关键词
magnetron sputtering; nanocomposite; structure; mechanical properties
Using the direct current reaction magnetron sputtering technique, Cr-Ni-B-C-N films are deposited onto silicon substrates by sputtering Cr-Ni and B-C targets in an Ar/N(2)gas mixture. The microstructure, chemical bonds, hardness, and tribological properties of the films are characterized using the X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) methods, and microindentation and tribological tests. The experimental results show that the microstructure and properties of the films change upon incorporation of nitrogen into the film composition. The Cr-Ni-B-C-N films are mainly composed of the nanocrystalline CrN phase with some fractions of the Ni, Cr2O3, and B(2)O(3)crystalline phases embedded in a mixed amorphous environment. Addition of nitrogen gives rise to an increase in the film hardness to a maximum value of about 17 GPa atF(N2)= 40 cm(3)/min, and then the hardness sharply decrease with a further increase in theF(N2)flow rate. The incorporation of nitrogen into the structure of films improves their tribological and adhesion properties.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据