期刊
JOURNAL OF APPLIED PHYSICS
卷 87, 期 3, 页码 1264-1269出版社
AMER INST PHYSICS
DOI: 10.1063/1.372006
关键词
-
Optical properties of TiN films have been studied using spectroscopic ellipsometry in the photon-energy range between 1.2 and 5.4 eV at room temperature. The TiN films are deposited on Si(100) substrates by reactive dc magnetron sputtering. The nearly stoichiometric golden-colored (g similar to 5.3 g/cm(3)) and brownish TiN films (g similar to 4.7 g/cm(3)) are investigated. The measured epsilon(E) spectra reveal distinct structures near the screened plasma edge and at interband critical points. These spectra are analyzed on the basis of a simplified model of the interband transitions including the Drude-Lorentz term contribution. Results are in satisfactory agreement with the experimental data over the entire range of photon energies. Dielectric-related optical constants, such as the complex refractive index, absorption coefficient, and normal-incidence reflectivity, of the sputter-deposited TiN films are also presented. (C) 2000 American Institute of Physics. [S0021-8979(00)07203-0].
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据