High-rate epitaxy of anatase films by atmospheric chemical vapor deposition

Crystalline orientation often provides particularly the anisotropy of chemical and physical properties. Since the epitaxial films are composed of highly oriented crystals, it is expected that chemical and physical advantages are predominantly in one specific direction. In this study, high-rate epitaxy of anatase films was attempted using a chemical-vapor-deposition technique. Four types of epitaxial anatase films were obtained, i.e., (112), (110), (100) and (001) oriented normal to the substrate surface. These films reduced methylene blue under ultraviolet irradiation. The reduction rate of methylene blue was largely affected in the direction of crystalline orientation.