Atomic resolution on Si(111)-(7x7) by noncontact atomic force microscopy with a force sensor based on a quartz tuning fork

Atomic resolution by noncontact atomic force microscopy with a self-sensing piezoelectric force sensor is presented. The sensor has a stiffness of 1800 N/m and is operated with sub-nanometer amplitudes, allowing atomic resolution with relatively bluntly etched tungsten tips. Sensitivity and noise are discussed. (C) 2000 American Institute of Physics. [S0003-6951(00)01011-1].