期刊
SCRIPTA MATERIALIA
卷 42, 期 7, 页码 687-694出版社
PERGAMON-ELSEVIER SCIENCE LTD
DOI: 10.1016/S1359-6462(99)00421-2
关键词
thin films; nanoindentation; polytetrafluoroethylene; dielectric materials; Young's modulus; hardness