Angular resolved energy distributions of sputtered atoms at low bombarding energy

In this contribution, measurements of energy distributions of sputtered metal atoms (tungsten and aluminum), released from polycrystalline metal targets by bombardment with noble gas ions (argon and xenon, respectively) in the energy range between 150 and 250 eV, are reported. Laser induced fluorescence spectroscopy in connection with a special designed detection geometry is applied to study energy distributions of atoms ejected in selected emission angles. Normal and oblique incidence is investigated. In both cases, systematic changes of the measured energy distribution with the emission angle are observed. The experimental distributions are compared to simulations performed by the Monte-Carlo code TRIM.SP. (C) 2000 Elsevier Science B.V. All rights reserved.