期刊
THIN SOLID FILMS
卷 366, 期 1-2, 页码 95-99出版社
ELSEVIER SCIENCE SA
DOI: 10.1016/S0040-6090(99)01097-4
关键词
thermal conduction; tetrahedral amorphous carbon (ta-C) films
Thermal conductivities of filtered cathodic vacuum are (FCVA) deposited tetrahedral amorphous carbon films, ranging from 20 to 100 nm, are measured using pulsed photothermal reflectance technique. The internal thermal conductivity of the tetrahedral amorphous carbon film is 4.7 W/m K. No thermal conductivity size effect is observed. The thermal boundary resistance between tetrahedral amorphous carbon with gold and silicon is 1.9 X 10(-8) m(2)K/W, which suggest good contact between tetrahedral amorphous carbon film with gold and silicon are achieved. Our measurement technique is calibrated by measuring silicon-dioxide and gold films' thermal conductivities. Internal thermal conductivity of tetrahedral amorphous carbon film is about four times higher than silicon-dioxide's internal thermal conductivity. (C) 2000 Elsevier Science S.A. All rights reserved.
作者
我是这篇论文的作者
点击您的名字以认领此论文并将其添加到您的个人资料中。
推荐
暂无数据