Determination of bonding in amorphous carbons by electron energy loss spectroscopy, Raman scattering and X-ray reflectivity

X-ray reflectivity (XRR) and Raman scattering are developed as non-destructive methods to find the density and sp(3) content of unhydrogenated and hydrogenated amorphous carbon films. An empirical relationship is found to derive the sp(3) fraction from visible Raman spectra, while ultraviolet (UV) Raman is able to directly detect sp(3) sites. The sp(3) fraction and density are linearly correlated in amorphous carbon (a-C) and hydrogenated amorphous carbon (a-C:H) films. (C) 2000 Elsevier Science B.V. All rights reserved.