Giant magnetostrictive thin films for applications in microelectromechanical systems (invited)

Sputter-deposited giant magnetostrictive thin films allow the realization of microactuators and sensors which can be addressed by remote control operation. Applications reviewed in this article are in the field of microelectromechanical systems (MEMS), e.g., microfluidic devices, micromotors, laser scanner mirrors etc. In general, all these MEMS applications of magnetostrictive thin films require a well defined uniaxial in-plane anisotropy and are operated at or above room temperature. In previous investigations it was found that (Tb40Fe60/Fe50Co50) multilayers represent the most promising thin film material with respect to their unique combination of soft magnetic and giant magnetostrictive properties. Consequently, this material was used to show the possibility to control the orientation of the magnetic easy axis by magnetic field annealing. Furthermore data about the temperature dependence of these magnetostrictive films are given. (C) 2000 American Institute of Physics. [S0021-8979(00)20308-3].